Micropump Fluidic Strategy for Fabricating Perovskite Microwire Array-Based Devices Embedded in Semiconductor Platform

​Microfluidic technologies are used to precisely manipulate fluid flow to integrate solution-processed materials in semiconductor devices. Here, a microfluidic method for incorporating perovskite into semiconductor-based devices is developed by embedding perovskite microwires (MWs) in Si microchannel platforms. The method relies on pumping a solution containing perovskite from the source to be precisely injected into Si microchannel arrays using filter paper that acts as a mesh of nano-/micropumps, owing to the capillary forces. Mask-free laser interference lithography is used to fabricate Si microchannels. Advanced characterization demonstrates that high-quality MWs are confined perfectly within the microchannel platform. Theoretical simulation is used to study the microfluidic mechanism. A high-performance photodetector based on the perovskite/Si MW array is obtained. Owing to this method’s simplicity, low cost, and zero chemical waste, it could pave the way for manufacturing cost-effective miniaturized perovskite in semiconductor platforms for a wide range of applications, including lab-on-a-chip technology.