Micropump Fluidic Strategy for Fabricating Perovskite Microwire Array-Based Devices Embedded in Semiconductor Platform

Bin Xin, Yusin Pak, Meng Shi, Somak Mitra, Xiaopeng Zheng, Osman M. Bakr, Iman S. Roqan
Cell Reports Physical Science 2, 100304, (2021)

Keywords

micro-/nanofluidic, micropump, laser interference lithography, fluid-processed nanowire arrays, perovskite-based optoelectronics

Abstract

​Microfluidic technologies are used to precisely manipulate fluid flow to integrate solution-processed materials in semiconductor devices. Here, a microfluidic method for incorporating perovskite into semiconductor-based devices is developed by embedding perovskite microwires (MWs) in Si microchannel platforms. The method relies on pumping a solution containing perovskite from the source to be precisely injected into Si microchannel arrays using filter paper that acts as a mesh of nano-/micropumps, owing to the capillary forces. Mask-free laser interference lithography is used to fabricate Si microchannels. Advanced characterization demonstrates that high-quality MWs are confined perfectly within the microchannel platform. Theoretical simulation is used to study the microfluidic mechanism. A high-performance photodetector based on the perovskite/Si MW array is obtained. Owing to this method’s simplicity, low cost, and zero chemical waste, it could pave the way for manufacturing cost-effective miniaturized perovskite in semiconductor platforms for a wide range of applications, including lab-on-a-chip technology.

Code

https://doi.org/10.1016/j.xcrp.2020.100304

Sources

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